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THETA.0 can be rapidly tuned by taking a one dimensional (1D) vertical cutline through the center of the gate and doing a 1D process simulation. You can either tune THETA.0 manually or by using the Optimize function in DECKBUILD. Theta.0 is tuned until the measured and simulated data of the long channel threshold voltage correspond. The fine tuning of THETA.0 is performed by using a full 2D simulation.

Figure 7.41 shows a typical dependence of extracted threshold voltage on the Theta.0 tuning parameter. Realistic values of THETA.0 correspond to the rising part of the curve. The glitch in the curve is due to rounding errors in the EXTRACT statement used to calculate the threshold voltage due to the automatic and independent mesh generated in the EXTRACT statement. The mesh can be changed from its default value shown here to eliminate this effect. But close examination reveals that the error is only a few millivolts off, which is accurate enough for most process parameter extractions.

Figure 7.41: A Typical Dependence of Extracted Threshold Voltage on Theta.0

X-axis = Theta.0, Y-axis = Threshold Voltage.

7.8.3: Tuning Implantation Parameters

You can now tune two implantation parameters by using the threshold voltage versus gate length data. The peak value of threshold voltage for a given process flow (the reverse short channel effect) will be a function of the initial implant damage caused by the LDD and source-drain implants. Since these implants have a high total dose and damage, the tuning parameter here is the clustering factor. In ATHENA, this parameter is called CLUST.FACT and is defined in the CLUSTER statement. The higher the clustering factor, the greater the damage, and the greater the diffusion, the greater the reverse short channel effect.

Figure 7.42 shows the effect on the threshold voltage of changing the CLUST.FACT parameter for a typical process flow.

Figure 7.42: How Changing the clust.fact parameter affects the threshold voltage

The second implantation parameter that can now be tuned is the lateral spread of the implant near the surface. In ATHENA, this parameter is called LAT.RATIO1 and is defined in the IMPLANT statement. The lateral spread of the source-drain and LDD dopant is responsible for the classical short channel effect, where the threshold voltage reduces for very short channel lengths. Simply tune the LAT.RATIO1 parameter until the onset of classical short channel effects of simulated and measured data correspond. If the LAT.RATIO1 is increased, the onset of the classical short channel effect will occur for longer gate lengths.

7.8.4: Tuning Diffusion Parameters

The final part of the threshold voltage versus gate length curve can now be used to tune the surface recombination rate of interstitials. In ATHENA, this parameter is called KSURF.0 and is specified in the INTERSTITIAL statement. The surface recombination of interstitials will dictate the roll-off rate of threshold voltage from its peak value (reverse short channel effect) to the long gate length value. Once again, simply tune KSURF.0 until the long channel threshold voltage roll off rate matches that of the measured data.

Questions & Answers

where we get a research paper on Nano chemistry....?
Maira Reply
what are the products of Nano chemistry?
Maira Reply
There are lots of products of nano chemistry... Like nano coatings.....carbon fiber.. And lots of others..
learn
Even nanotechnology is pretty much all about chemistry... Its the chemistry on quantum or atomic level
learn
Google
da
no nanotechnology is also a part of physics and maths it requires angle formulas and some pressure regarding concepts
Bhagvanji
Preparation and Applications of Nanomaterial for Drug Delivery
Hafiz Reply
revolt
da
Application of nanotechnology in medicine
what is variations in raman spectra for nanomaterials
Jyoti Reply
I only see partial conversation and what's the question here!
Crow Reply
what about nanotechnology for water purification
RAW Reply
please someone correct me if I'm wrong but I think one can use nanoparticles, specially silver nanoparticles for water treatment.
Damian
yes that's correct
Professor
I think
Professor
Nasa has use it in the 60's, copper as water purification in the moon travel.
Alexandre
nanocopper obvius
Alexandre
what is the stm
Brian Reply
is there industrial application of fullrenes. What is the method to prepare fullrene on large scale.?
Rafiq
industrial application...? mmm I think on the medical side as drug carrier, but you should go deeper on your research, I may be wrong
Damian
How we are making nano material?
LITNING Reply
what is a peer
LITNING Reply
What is meant by 'nano scale'?
LITNING Reply
What is STMs full form?
LITNING
scanning tunneling microscope
Sahil
how nano science is used for hydrophobicity
Santosh
Do u think that Graphene and Fullrene fiber can be used to make Air Plane body structure the lightest and strongest. Rafiq
Rafiq
what is differents between GO and RGO?
Mahi
what is simplest way to understand the applications of nano robots used to detect the cancer affected cell of human body.? How this robot is carried to required site of body cell.? what will be the carrier material and how can be detected that correct delivery of drug is done Rafiq
Rafiq
if virus is killing to make ARTIFICIAL DNA OF GRAPHENE FOR KILLED THE VIRUS .THIS IS OUR ASSUMPTION
Anam
analytical skills graphene is prepared to kill any type viruses .
Anam
Any one who tell me about Preparation and application of Nanomaterial for drug Delivery
Hafiz
what is Nano technology ?
Bob Reply
write examples of Nano molecule?
Bob
The nanotechnology is as new science, to scale nanometric
brayan
nanotechnology is the study, desing, synthesis, manipulation and application of materials and functional systems through control of matter at nanoscale
Damian
Is there any normative that regulates the use of silver nanoparticles?
Damian Reply
what king of growth are you checking .?
Renato
What fields keep nano created devices from performing or assimulating ? Magnetic fields ? Are do they assimilate ?
Stoney Reply
why we need to study biomolecules, molecular biology in nanotechnology?
Adin Reply
?
Kyle
yes I'm doing my masters in nanotechnology, we are being studying all these domains as well..
Adin
why?
Adin
what school?
Kyle
biomolecules are e building blocks of every organics and inorganic materials.
Joe
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Source:  OpenStax, Solid state physics and devices-the harbinger of third wave of civilization. OpenStax CNX. Sep 15, 2014 Download for free at http://legacy.cnx.org/content/col11170/1.89
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