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The choice of model or combination of models for any of the process steps described above is defined in the METHOD statement. The METHOD statement serves a number of functions but in the context of defining damage models the METHOD statement is used for two purposes.

The first purpose is to specify models for how damage is induced during processes such as implantation or oxidation. The second purpose is to specify how that damage anneals and diffuses in subsequent or concurrent thermal processes.

It’s important to realize that the METHOD statement must be placed above the line, specifying the process step or steps to which it refers in the input file. Any number of method statements can be used in an input file allowing you to change the models at will during the process flow to optimize the speed and accuracy of the simulation. The models specified in the METHOD statement will hold true for all processes that follow it until it’s updated by a subsequent method statement.

Table 7.5 below indicates a recommended method statement for typical processes. It should be realized that these statements are hierarchical, so there is no accuracy lost if a more complicated model is used where a simpler one would suffice. The only downside here is a longer simulation time. The table below starts off with the simplest of models and progresses to the more complicated ones.

Table 7.5. Recommended Method Statements for Typical Processes.

Method Statement Syntax Suitability of using this method
method fermi Use only before undamaged silicon diffusions, where doping concentrations are less than 1e20/cm3 and no oxidizing ambient is present.
method two.dim Use before implant doses less than 1e13/cm2 and for oxidations.
method full.cpl cluster.dam high.conc Use before implant doses greater than 1e13/cm2 : Changing the Method Statement During the Process Flow

It has previously been stated that the disadvantage of using the most advanced and complex models is the time involved during diffusion cycle simulation. Accordingly, there is an incentive during complex process simulations to switch back to a simpler model during a diffusion cycle when the majority of the damage created by a previous implant has been annealed. We will show you when to switch to a simpler model.

If the process being modeled has involved implantation or oxidation at any stage, we advise not to use the fermi model. An exception to this would be in some power devices with very long diffusion times where the exact nature of surface damage would have little impact on the final distribution of the dopant and simulation time is at a premium.

In reality, for most small geometry processes, the question of switching models becomes one of when to add a new method statement that changes from:




after a high dose implant. Switching Guidelines.

A simple guideline to follow when to switch method statements during a process flow is by switching back to the TWO.DIM model if the anneal temperature is greater than 900° and the device has been annealed for at least one minute, following an implant where the dose is greater than 1e13/cm^2.

Questions & Answers

What fields keep nano created devices from performing or assimulating ? Magnetic fields ? Are do they assimilate ?
Stoney Reply
why we need to study biomolecules, molecular biology in nanotechnology?
Adin Reply
yes I'm doing my masters in nanotechnology, we are being studying all these domains as well..
what school?
biomolecules are e building blocks of every organics and inorganic materials.
anyone know any internet site where one can find nanotechnology papers?
Damian Reply
sciencedirect big data base
Introduction about quantum dots in nanotechnology
Praveena Reply
what does nano mean?
Anassong Reply
nano basically means 10^(-9). nanometer is a unit to measure length.
do you think it's worthwhile in the long term to study the effects and possibilities of nanotechnology on viral treatment?
Damian Reply
absolutely yes
how to know photocatalytic properties of tio2 nanoparticles...what to do now
Akash Reply
it is a goid question and i want to know the answer as well
characteristics of micro business
for teaching engĺish at school how nano technology help us
Do somebody tell me a best nano engineering book for beginners?
s. Reply
there is no specific books for beginners but there is book called principle of nanotechnology
what is fullerene does it is used to make bukky balls
Devang Reply
are you nano engineer ?
fullerene is a bucky ball aka Carbon 60 molecule. It was name by the architect Fuller. He design the geodesic dome. it resembles a soccer ball.
what is the actual application of fullerenes nowadays?
That is a great question Damian. best way to answer that question is to Google it. there are hundreds of applications for buck minister fullerenes, from medical to aerospace. you can also find plenty of research papers that will give you great detail on the potential applications of fullerenes.
what is the Synthesis, properties,and applications of carbon nano chemistry
Abhijith Reply
Mostly, they use nano carbon for electronics and for materials to be strengthened.
is Bucky paper clear?
carbon nanotubes has various application in fuel cells membrane, current research on cancer drug,and in electronics MEMS and NEMS etc
so some one know about replacing silicon atom with phosphorous in semiconductors device?
s. Reply
Yeah, it is a pain to say the least. You basically have to heat the substarte up to around 1000 degrees celcius then pass phosphene gas over top of it, which is explosive and toxic by the way, under very low pressure.
Do you know which machine is used to that process?
how to fabricate graphene ink ?
for screen printed electrodes ?
What is lattice structure?
s. Reply
of graphene you mean?
or in general
in general
Graphene has a hexagonal structure
On having this app for quite a bit time, Haven't realised there's a chat room in it.
what is biological synthesis of nanoparticles
Sanket Reply
what's the easiest and fastest way to the synthesize AgNP?
Damian Reply
how did you get the value of 2000N.What calculations are needed to arrive at it
Smarajit Reply
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