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SSPD_Chapter 6_Part 7_Introduction to ATHENA6_Process Simulator describes the need for multiple models for each process, choosing appropriate model with method statement,method statements during process flow,switching guidelines, modeling the correct substrate depth, simulating ion implantation, simulating ion implantation damage, simulating diffusion, simulating rapid thermal anneal and simulating oxidation.

SSPD_Chapter 6_Part 7_Introduction to ATHENA 6_Process Simulator.

7.7. Background of ATHENA.

7.7.3. Choosing Models In SSUPREM4

This section describes how to simulate process steps (e.g., implantation, diffusion/oxidation, epitaxy, and silicidation) specific to the SSUPREM4 module of ATHENA. Also discussed, are the SSUPREM4 model statements, such as METHOD, OXIDE, MATERIAL, and IMPURITY.

When simulating any process involving dopant or its diffusion or both, it is absolutely critical for simulation accuracy to use the appropriate model. Process steps where correct choice of models are vital include implantation, diffusion, rapid thermal annealing, oxidation, and epitaxy . This section provides specific advice on which models should be used for each process step.

7.7.3.1: The Reason for Multiple Models for Each Process

The key to simulating any dopant related process is to accurately account for damage in the semiconductor. For example, in silicon processing, typical implantation doses can cause sufficient damage to the substrate to enhance dopant diffusion rates by three orders of magnitude or more, so choosing the wrong model in this instance will result in inaccurate results.

Well known device anomalies such as the Reverse Short Channel Effect in MOS processing or the emitter push effect in bipolar processing are wholly the result of such damage enhanced diffusion.

Other processes that consume the semiconductor, such as oxidation and silicidation also inject damage into the substrate. This must be accounted for if accurate dopant profiles are a requirement.

This section aims to provide you with a set of rules outlined, indicating the correct model that can be used most of the time without you having a detailed knowledge of the physics involved. The usual rules of model selection apply here. The more complicated the model, the greater the simulation time. There is always a compromise between simulation accuracy and simulation time. The following sections describe when to use the hierarchy of models so that the most complicated models are only used when you make a significant difference to the result.

7.7.3.2.: Choosing an Appropriate Model Using the Method Statement

The hierarchy of diffusion and damage models available is broadly related to the maximum level of damage already in the semiconductor or the maximum level of damage that the next process step is likely to introduce at any particular time during the process flow. The level of damage in the semiconductor at any one time is not a static quantity but will depend on when and how much damage was induced by a process step and how much annealing has occurred in subsequent thermal steps. The range of models available to you can account for all of the above effects and allows accurate simulation of dopant diffusion if appropriate models have been chosen.

Questions & Answers

where we get a research paper on Nano chemistry....?
Maira Reply
what are the products of Nano chemistry?
Maira Reply
There are lots of products of nano chemistry... Like nano coatings.....carbon fiber.. And lots of others..
learn
Even nanotechnology is pretty much all about chemistry... Its the chemistry on quantum or atomic level
learn
Google
da
no nanotechnology is also a part of physics and maths it requires angle formulas and some pressure regarding concepts
Bhagvanji
Preparation and Applications of Nanomaterial for Drug Delivery
Hafiz Reply
revolt
da
Application of nanotechnology in medicine
what is variations in raman spectra for nanomaterials
Jyoti Reply
I only see partial conversation and what's the question here!
Crow Reply
what about nanotechnology for water purification
RAW Reply
please someone correct me if I'm wrong but I think one can use nanoparticles, specially silver nanoparticles for water treatment.
Damian
yes that's correct
Professor
I think
Professor
Nasa has use it in the 60's, copper as water purification in the moon travel.
Alexandre
nanocopper obvius
Alexandre
what is the stm
Brian Reply
is there industrial application of fullrenes. What is the method to prepare fullrene on large scale.?
Rafiq
industrial application...? mmm I think on the medical side as drug carrier, but you should go deeper on your research, I may be wrong
Damian
How we are making nano material?
LITNING Reply
what is a peer
LITNING Reply
What is meant by 'nano scale'?
LITNING Reply
What is STMs full form?
LITNING
scanning tunneling microscope
Sahil
how nano science is used for hydrophobicity
Santosh
Do u think that Graphene and Fullrene fiber can be used to make Air Plane body structure the lightest and strongest. Rafiq
Rafiq
what is differents between GO and RGO?
Mahi
what is simplest way to understand the applications of nano robots used to detect the cancer affected cell of human body.? How this robot is carried to required site of body cell.? what will be the carrier material and how can be detected that correct delivery of drug is done Rafiq
Rafiq
if virus is killing to make ARTIFICIAL DNA OF GRAPHENE FOR KILLED THE VIRUS .THIS IS OUR ASSUMPTION
Anam
analytical skills graphene is prepared to kill any type viruses .
Anam
Any one who tell me about Preparation and application of Nanomaterial for drug Delivery
Hafiz
what is Nano technology ?
Bob Reply
write examples of Nano molecule?
Bob
The nanotechnology is as new science, to scale nanometric
brayan
nanotechnology is the study, desing, synthesis, manipulation and application of materials and functional systems through control of matter at nanoscale
Damian
Is there any normative that regulates the use of silver nanoparticles?
Damian Reply
what king of growth are you checking .?
Renato
What fields keep nano created devices from performing or assimulating ? Magnetic fields ? Are do they assimilate ?
Stoney Reply
why we need to study biomolecules, molecular biology in nanotechnology?
Adin Reply
?
Kyle
yes I'm doing my masters in nanotechnology, we are being studying all these domains as well..
Adin
why?
Adin
what school?
Kyle
biomolecules are e building blocks of every organics and inorganic materials.
Joe
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Source:  OpenStax, Solid state physics and devices-the harbinger of third wave of civilization. OpenStax CNX. Sep 15, 2014 Download for free at http://legacy.cnx.org/content/col11170/1.89
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