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SSPD_Chapter 6_Part 7 is continuation of "Creating Device Structures".Here we give 'geometrical etch','reducing grid points','reflecting the half structure to get the full structure','specifying the electrodes' and 'saving a structure file'.

SSPD_Chapter 6_Part 7_Introduction to ATHENA2

SECTION 7.7 Background of ATHENAcontinued.

7.7.2. Creating Device Structure using ATHENA

7.7.2.5. Simple Geometrical Etches

The next step in this tutorial process simulation is to define the polysilicon gate definition. (Implant and thermal steps will be discussed in later Section :“Choosing Models In SSUPREM4”). To set a geometrical etch step, select Process→Etch→Etch... from the Command menu of DECKBUILD. The ATHENA Etch Menu (Figure 7.24) will appear.

The Geometrical etch is the default method. Other methods will be discussed in later Section called “Deposition and Wet/Dry Etching using the Physical Models in ATHENA/ELITE”. Select Polysilicon from the Material menu. This example will use a polysilicon gate edge at x=0.3 and set the center of the gate at x=0.0 for the initial grid. Therefore, polysilicon should be etched to the right from x=0.3. To do so, select Right from the Geometrical type , and set the Etch location to 0.3. This will give the following statement: # POLY DEFINITION

ETCH POLY RIGHT P1.X=0.3

The structure created by this ETCH statement is shown in the left hand plot of Figure 7.25.

You can obtain an arbitrary shape of geometrical etching by using the Any Shape button. For example, to make a tilted etch, specify X and Y locations of four Arbitrary points as shown in Figure 7.26 .

The following four etch lines will be inserted into the input file:

# POLY DEFINITION

ETCH POLY START X=0.2 Y= -1

ETCH CONT X=0.4 Y= 1

ETCH CONT X=1 Y= 1

ETCH DONE X=1 Y= -1

If this input file fragment is run instead of the previous one (using the INIT statement from the History capability), the structure after this etch sequence will appear as displayed in the right hand plot in Figure 7.25. ATHENA etches all polysilicon material within the specified polygon [ polygon is defined by the points P1(x= 0.2,y= -1),P2(0.4,+1),P3(1,1)&P4(1,-1)]. The polygon etch can consist of any number of points. If you use the Insert button, an additional point will appear after the currently selected point.

Figur7.25: Structure Created by Etch Statement (a)Right etch (b) Any Shape.

Figure 7.26. ATHENA Etch Menu for arbitrary etch.

An additional option for geometrical etching is a dry etch with a specified thickness. This can be used for spacer formation as follows: deposit an oxide of a specified thickness (e.g., 0.5µm) right to poly-Si and then etch the same thickness again beyond x = 0.6µm.

# CLEAN GATE OXIDE

ETCH OXIDE DRY THICK=0.02

# SPACER DEPOSITION

DEPOSIT OXIDE THICK=0.5 DIVISIONS=8

# SPACER ETCHING

ETCH OXIDE DRY THICK=0.53

The dry etching step etches the specified material in the region between the top (exposed) boundary of the structure and a line obtained by translating the boundary line down in the Y direction. The etch distance is specified by the THICK parameter. Figure 7-27 shows the resulting spacer.Figure 7.27 is given in the next module.

Questions & Answers

Application of nanotechnology in medicine
what is variations in raman spectra for nanomaterials
Jyoti Reply
I only see partial conversation and what's the question here!
Crow Reply
what about nanotechnology for water purification
RAW Reply
please someone correct me if I'm wrong but I think one can use nanoparticles, specially silver nanoparticles for water treatment.
Damian
yes that's correct
Professor
I think
Professor
what is the stm
Brian Reply
is there industrial application of fullrenes. What is the method to prepare fullrene on large scale.?
Rafiq
industrial application...? mmm I think on the medical side as drug carrier, but you should go deeper on your research, I may be wrong
Damian
How we are making nano material?
LITNING Reply
what is a peer
LITNING Reply
What is meant by 'nano scale'?
LITNING Reply
What is STMs full form?
LITNING
scanning tunneling microscope
Sahil
how nano science is used for hydrophobicity
Santosh
Do u think that Graphene and Fullrene fiber can be used to make Air Plane body structure the lightest and strongest. Rafiq
Rafiq
what is differents between GO and RGO?
Mahi
what is simplest way to understand the applications of nano robots used to detect the cancer affected cell of human body.? How this robot is carried to required site of body cell.? what will be the carrier material and how can be detected that correct delivery of drug is done Rafiq
Rafiq
if virus is killing to make ARTIFICIAL DNA OF GRAPHENE FOR KILLED THE VIRUS .THIS IS OUR ASSUMPTION
Anam
analytical skills graphene is prepared to kill any type viruses .
Anam
what is Nano technology ?
Bob Reply
write examples of Nano molecule?
Bob
The nanotechnology is as new science, to scale nanometric
brayan
nanotechnology is the study, desing, synthesis, manipulation and application of materials and functional systems through control of matter at nanoscale
Damian
Is there any normative that regulates the use of silver nanoparticles?
Damian Reply
what king of growth are you checking .?
Renato
What fields keep nano created devices from performing or assimulating ? Magnetic fields ? Are do they assimilate ?
Stoney Reply
why we need to study biomolecules, molecular biology in nanotechnology?
Adin Reply
?
Kyle
yes I'm doing my masters in nanotechnology, we are being studying all these domains as well..
Adin
why?
Adin
what school?
Kyle
biomolecules are e building blocks of every organics and inorganic materials.
Joe
anyone know any internet site where one can find nanotechnology papers?
Damian Reply
research.net
kanaga
sciencedirect big data base
Ernesto
Introduction about quantum dots in nanotechnology
Praveena Reply
hi
Loga
what does nano mean?
Anassong Reply
nano basically means 10^(-9). nanometer is a unit to measure length.
Bharti
how did you get the value of 2000N.What calculations are needed to arrive at it
Smarajit Reply
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Source:  OpenStax, Solid state physics and devices-the harbinger of third wave of civilization. OpenStax CNX. Sep 15, 2014 Download for free at http://legacy.cnx.org/content/col11170/1.89
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