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This module was developed as part of the Rice University course CHEM-496: Chemistry of Electronic Materials . This module was prepared with the assistance of Wei Zhao.

Introduction

Chemical vapor deposition (CVD) is a process for depositing solid elements and compounds by reactions of gas-phase molecular precursors. Deposition of a majority of the solid elements and a large and ever-growing number of compounds is possible by CVD.

Most metallization for microelectronics today is performed by the physical vapor deposition (PVD) processes of evaporation and sputtering, which are often conceptually and experimentally more straightforward than CVD. However, the increasing importance of CVD is due to a large degree to the advantages that it holds over physical vapor deposition. Foremost among these are the advantages of conformal coverage and selectivity. Sputtering and evaporation are by their nature line-of-sight deposition processes in which the substrate to be coated must be placed directly in front of the PVD source. In contrast, CVD allows any substrate to be coated that is in a region of sufficient precursor partial pressure. This allows the uniform coating of several substrate wafers at once, of both sides of a substrate wafer, or of a substrate of large size and/or complex shape. The PVD techniques clearly will also deposit metal on any surface that is in line of sight. On the other hand, it is possible to deposit selectively on some substrate materials in the presence of others using CVD, because the deposition is controlled by the surface chemistry of the precursor/substrate pair. Thus, it may be possible, for example, to synthesize a CVD precursor that under certain conditions will deposit on metals but not on an insulating material such as SiO 2 , and to exploit this selectivity, for example, in the fabrication of a very large-scale integrated (VLSI) circuit. It should also be pointed out that, unlike some PVD applications, CVD does not cause radiation damage of the substrate.

Since the 1960s, there has been considerable interest in the application of metal CVD for thin-film deposition for metallization of integrated circuits. Research on the thermal CVD of copper is motivated by the fact that copper has physical properties that may make it superior to either tungsten or aluminum in certain microelectronics applications. The resistivity of copper (1.67 mW.cm) is much lower than that of tungsten (5.6 mW.cm) and significantly lower than that of aluminum (2.7 mW.cm). This immediately suggests that copper could be a superior material for making metal interconnects, especially in devices where relatively long interconnects are required. The electromigration resistance of copper is higher than that of aluminum by four orders of magnitude. Copper has increased resistance to stress-induced voidage due to its higher melting point versus aluminum. There are also reported advantages for copper related device performance such as greater speed and reduced cross talk and smaller RC time constants. On the whole, the combination of superior resistivity and intermediate reliability properties makes copper a promising material for many applications, provide that suitable CVD processes can be devised.

Questions & Answers

where we get a research paper on Nano chemistry....?
Maira Reply
what are the products of Nano chemistry?
Maira Reply
There are lots of products of nano chemistry... Like nano coatings.....carbon fiber.. And lots of others..
learn
Even nanotechnology is pretty much all about chemistry... Its the chemistry on quantum or atomic level
learn
Google
da
no nanotechnology is also a part of physics and maths it requires angle formulas and some pressure regarding concepts
Bhagvanji
Preparation and Applications of Nanomaterial for Drug Delivery
Hafiz Reply
revolt
da
Application of nanotechnology in medicine
what is variations in raman spectra for nanomaterials
Jyoti Reply
I only see partial conversation and what's the question here!
Crow Reply
what about nanotechnology for water purification
RAW Reply
please someone correct me if I'm wrong but I think one can use nanoparticles, specially silver nanoparticles for water treatment.
Damian
yes that's correct
Professor
I think
Professor
Nasa has use it in the 60's, copper as water purification in the moon travel.
Alexandre
nanocopper obvius
Alexandre
what is the stm
Brian Reply
is there industrial application of fullrenes. What is the method to prepare fullrene on large scale.?
Rafiq
industrial application...? mmm I think on the medical side as drug carrier, but you should go deeper on your research, I may be wrong
Damian
How we are making nano material?
LITNING Reply
what is a peer
LITNING Reply
What is meant by 'nano scale'?
LITNING Reply
What is STMs full form?
LITNING
scanning tunneling microscope
Sahil
how nano science is used for hydrophobicity
Santosh
Do u think that Graphene and Fullrene fiber can be used to make Air Plane body structure the lightest and strongest. Rafiq
Rafiq
what is differents between GO and RGO?
Mahi
what is simplest way to understand the applications of nano robots used to detect the cancer affected cell of human body.? How this robot is carried to required site of body cell.? what will be the carrier material and how can be detected that correct delivery of drug is done Rafiq
Rafiq
if virus is killing to make ARTIFICIAL DNA OF GRAPHENE FOR KILLED THE VIRUS .THIS IS OUR ASSUMPTION
Anam
analytical skills graphene is prepared to kill any type viruses .
Anam
Any one who tell me about Preparation and application of Nanomaterial for drug Delivery
Hafiz
what is Nano technology ?
Bob Reply
write examples of Nano molecule?
Bob
The nanotechnology is as new science, to scale nanometric
brayan
nanotechnology is the study, desing, synthesis, manipulation and application of materials and functional systems through control of matter at nanoscale
Damian
Is there any normative that regulates the use of silver nanoparticles?
Damian Reply
what king of growth are you checking .?
Renato
What fields keep nano created devices from performing or assimulating ? Magnetic fields ? Are do they assimilate ?
Stoney Reply
why we need to study biomolecules, molecular biology in nanotechnology?
Adin Reply
?
Kyle
yes I'm doing my masters in nanotechnology, we are being studying all these domains as well..
Adin
why?
Adin
what school?
Kyle
biomolecules are e building blocks of every organics and inorganic materials.
Joe
how did you get the value of 2000N.What calculations are needed to arrive at it
Smarajit Reply
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Source:  OpenStax, Chemistry of electronic materials. OpenStax CNX. Aug 09, 2011 Download for free at http://cnx.org/content/col10719/1.9
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