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Chemical vapor deposition

OpenStax
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Selecting a molecular precursor for chemical vapor deposition
1   Introduction
2   Factors in selecting a cvd precursor molecule
3   Bibliography
Determination of sublimation enthalpy and vapor pressure for inorganic
Metal organic chemical vapor deposition of calcium fluoride
Precursors for chemical vapor deposition of copper
1   Introduction
2   Applications of metal cvd
3   Copper cvd
4   From cu(ii) precursors
5   Volatile cu(ii) compounds
6   Synthesis of cu(ii) precursors
7   Cu(hfac) 2 ·nh 2 O (n = 0, 1, 2)
8   Schiff-base complexes
9   Reaction mechanism
10   From cu(i) precursors
11   Precursor design
12   Reaction mechanism
13   Selectivity
14   Bibliography

Source:  OpenStax, Chemistry of electronic materials. OpenStax CNX. Aug 09, 2011 Download for free at http://cnx.org/content/col10719/1.9
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